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Traps at the Bonded Si/SiO2 Interface in Silicon-on-Insulator Structures

Author(s):
Antonova, I.V.
Stano, J.
Nikolaev, D.V.
Naumova, O.V.
Popov, V.P.
Skuratov, V.A.
1 more
Publication title:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-19
Pub. date:
2003
Page(from):
64
Page(to):
69
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774024 [1566774020]
Language:
English
Call no.:
E23400/200319
Type:
Conference Proceedings

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