Blank Cover Image

53. Effect of thermal annealing on mist-deposited HISiO4/SiO,/Si structures

Author(s):
Chong, K.
Lee, D.-O.
Shanmugosondoroni, K.
Romon, P.
Shallenberger, J.
Wang, I.
Mumbaner, P.
Grant, R.
Rusyllo, J.
4 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-14
Pub. Year:
2003
Page(from):
429
Page(to):
436
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
Language:
English
Call no.:
E23400/200314
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings STUDY OF THE EFFECT OF SILICON SURFCE TREATMENT ON EOT IN HIGH-k DIELECTRIC MOS GATE STACK

Chang, K., Shanmugasundaram, K., Lee, D.-O., Roman, P., Shallenberger, J., Chang, F.-M., Wang, J., Beck, R., Mumbauer, …

Electrochemical Society
7 Conference Proceedings The Impact of Rapid Thermal Annealing on the Properties of the Si (100)-SiO2 Interface

Hurley, P. K., Leveugle, C., Mathewson, A., Doyle, D., Whiston, S., Prendergast, J., Lundgren, P.

MRS - Materials Research Society
2 Conference Proceedings Studies of High-k Gate Dielectrics Deposited hy the Liquid Source Misted Chemical Deposition Method

Lee, D., Roman, P., Mumbauer, P., Grant, R., Horn, M., Ruzyllo, J.

Electrochemical Society
8 Conference Proceedings Mist Deposition for TFT Technology

K. Shanmugasundaram, S. Price, K. Chang, D. Lee, J. Ruzyllo

Electrochemical Society
3 Conference Proceedings RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS

Williams, J. A. A., Shen, C. Q., Vuong, K. D., Tenpas, E., Condrate, R. A., Sr., Lee, D. H., Wang, H., Fagan, J., Wang, …

MRS - Materials Research Society
9 Conference Proceedings Compositional and Electrical Differences of SiO2/SiC and SiO2/Si Structures Upon Thermal Annealing in N2O and NO

Stedile, F.C., Radtke, C., Baumvol, I.J.R., Boudinov, H., McDonald, K., Huang, M.B., Weller, R.A., Feldman, L.C., …

Electrochemical Society
4 Conference Proceedings Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon

Zhao, W., Brotzen, F. R., Hehn. L., Loos, P. J.

MRS - Materials Research Society
10 Conference Proceedings Effect of Rapid Thermal Annealing Condition on the Structure and Conductivity Properties of Polycrystalline Silicon Films on Glass

W.Y. Wang, J.H. Huang, X.P. Zhang, W.J. Song, R.Q. Tan

Trans Tech Publications
5 Conference Proceedings Electrical Properties of Atomic-Layer-Deposited La2O3/Thermal-Nitrided SiO2 Stacking Dielectric on 4H-SiC(0001)

J.H. Moon, K.Y. Cheong, D.I. Eom, H.K. Song, J.H. Yim, J.H. Lee, H.J. Na, W. Bahng, N.K. Kim, H.J. Kim

Trans Tech Publications
11 Conference Proceedings Interface Properties of 4H-SiC/SiO2 with MOS Capacitors and FETs Annealed in O2, N2O, NO and CO2

Wang, W., Banerjee, S., Chow, T.P., Gutmann, R.J., Issacs-Smith, T., Williams, J., Jones, K.A., Lelis, A., Tipton, W., …

Trans Tech Publications
6 Conference Proceedings Growth Temperature and Properties of Ge4Sb3Te3 Films

Song, W. D., Shi, L. P., Miao, X. S., Hu, X., Lee, H. K., Zhao, R., Chong, J. F., Chong, T. C.

Materials Research Society
12 Conference Proceedings RAPID THERMAL ANNEALING OF DEPOSITED SiO2 FILMS

Wong, J., Lu, T-M., Cohen, S. S., Mehta, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12