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44. Poly-Si gate CMOS with hafnium silicate gate dielectric

Author(s):
Hobbs, C.
Grant, J.
Kher, S.
Dhandapani, V.
Taylor, B.
Dip, L.
Hegde, R.
Metzner, C.
Tseng, H.
Gilmer, D.
Franke, A.
Garcia, R.
Ilebert, L.
Azrak, M.
Sing, D.
Stephens, J.K
Scrogum, C.
Rai, R.
Becnel, V
Conner, I
White, B.
Tobin, P.
17 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-14
Pub. Year:
2003
Page(from):
361
Page(to):
366
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
Language:
English
Call no.:
E23400/200314
Type:
Conference Proceedings

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