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29 Batch Atomic Layer Deposition for MIM capacitors

Author(s):
de Blank, R.
Snijders, G.J.
Beulens, S.
Vandezande, L.
Wilhelm, R.
Hasper, A.
1 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-14
Pub. Year:
2003
Page(from):
225
Page(to):
230
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773966 [1566773962]
Language:
English
Call no.:
E23400/200314
Type:
Conference Proceedings

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