13 The role of fluorine with Ge pre-amorphization in forming pMOS junctions for the 65-nm CMOS technology node

13 The role of fluorine with Ge pre-amorphization in forming pMOS junctions for the 65-nm CMOS technology node

Author(s):

Pawlak, B.J

Publication title:

Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-14

Pub. Year:

2003

Page(from):

99

Page(to):

104

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773966 [1566773962]

Language:

English

Call no.:

E23400/200314

Type:

Conference Proceedings

Details

TDL ID:	ZA00014078
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Advanced short-time thermal processing for Si-based CMOS devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	2003 ; 203rd
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2003.04.27-2003.04.30

Similar Items:

1 Conference Proceedings Integration of Low and High Temperature Junction Anneals for 45 nm CMOS Lindsay, R., Pawlak, B., Henson, K., Satta, A., Severi, S., Lauwers, A., Surdeanu, R., McCoy, S., Gelpey, J., Pages, X., … Electrochemical Society	7 Conference Proceedings The Role of Preamorphization and Activation for Ultra Shallow Junction Formation on Strained Si Layers Grown on SiGe Buffer Pawlak, B.J., Vandervorst, W., Lindsay, R., Wolf, I.De, Roozeboom, F., Delhougne, R., Benedetti, A., Loo, R., Caymax, … Materials Research Society
2 Conference Proceedings Channel Engineering and Junction Overlap Issues for Ultra-Shallow Junctions Formed by SPER in the 45 nm CMOS Technology Node Severi, Simone, Henson, Kirklen, Lindsay, Richard, Lauwers, Anne, Pawlak, Bartek J., Surdeanu, Radu, Meyer, K.De Materials Research Society	8 Conference Proceedings The Role of Preamorphization and Activation for Ultra-Shallow Junction Formation on Strained Si Layers Grown on SiGe Buffer Pawlak, B.J., Vandervorst, W., Lindsay, R., Wolf, I.De, Roozeboom, F., Delhougne, R., Benedetti, A., Loo, R., Caymax, … Materials Research Society
3 Conference Proceedings A Comparison Of Spike, Flash, SPER and Laser Annealing For 45nm CMOS Lindsay, R., Pawlak, B., Kittl, J., Henson, K., Torregiani, C., Giangrandi, S., Surdeanu, R., Vandervorst, W., Mayur, … Materials Research Society	9 Conference Proceedings Application of CPL reticle technology for the 65- and 50-nm node Conley, W., Broeke, D.J.V.D., Socha, R.J., Wu, W., Litt, L.C., Lucas, K., Nelson-Thomas, C.M., Roman, B.J., Chen, F., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings Laser Annealing for Ultra-Shallow Junction Formation in Advanced CMOS Surdeanu, R., Ponomarev, Y.V., Cerutti, R., Pawlak, B.J., Nanver, L.K., Hoflijk, I., Stolk, P.A., Dachs, C.J.J., … Electrochemical Society	10 Conference Proceedings 12 Performance enhancements for 50-nm PMOS by angled pre-amorphization implants and fluorine implants Chidambaram, P.R., Ekbote, S., Chakravarthi, S., Chatterjee, A., Machala, C.F., Johnson, S.F. Electrochemical Society
5 Conference Proceedings Optimization of Fluorine Co-Implantation for PMOS Source and Drain Extension Formation for 65 nm Technology Node Graoui, H., Hilkene, M., McComb, B., Castle, M., Felch, S., Cowern, N.E.B., Al-Bayati, A., Tjandra, A., Foad, M.A. Materials Research Society	11 Conference Proceedings The Effect of Ramp Rate-Short Process Time and Partial Reactions on Cobalt and Nickel Silicide Formation Pages, X., van der Jeugd, K., Kuznetsov, V., Granneman, E., Lauwers, A., Lindsay, R. Electrochemical Society
6 Conference Proceedings Optimization of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm Cmos Lindsay, Richard, Pawlak, Bartlomiej J., Stolk, Peter, Maex, Karen Materials Research Society	12 Conference Proceedings 31 New Materials, Processes and Device Structures for 65nm CMOS Technology Node and Beyond Nguyen, B.-Y., Them, A., Zhang, D., White, T., Sadaka, M., Triyoso, D., Schaeffer, J., Goolsby, B., Dhandapani, V., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12