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In-Situ Chemical Surface Treatments For The Removal of AIN/SiC Interfacial Contamination

Author(s):
Stodilka, D.O.
Gila, B.P.
Abernathy, C.R.
Lambers, E.
Ren, F.
Pearton, S.I.
1 more
Publication title:
State-of-the-art program on compound semiconductors XXXIX and nitride and wide bandgap semiconductors for sensors, photonics, and electronics IV : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-11
Pub. Year:
2003
Page(from):
350
Page(to):
354
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773911 [1566773911]
Language:
English
Call no.:
E23400/200311
Type:
Conference Proceedings

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