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Strip Process Optimization for Porous ULK Films

Author(s):
Kalinowski, I.J.
Bourlot, C.
Marfoure, A.
Louveau, O.
Li, S.
Su, J.
Hills, G.W.
Louis, D.
3 more
Publication title:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-10
Pub. Year:
2003
Page(from):
216
Page(to):
223
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772945 [156677294X]
Language:
English
Call no.:
E23400/200310
Type:
Conference Proceedings

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