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Effects of C2H2 Gas Content on the Characteristics of DLC Films Deposited by Magnetron Sputtering

Author(s):
Libardi, J.
Massi, M.
Otani, C.
Ravagnani, S.P.
Maciel, H.S.
Guerino, M.
Ocampo, J.M.J.
2 more
Publication title:
Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-9
Pub. Year:
2003
Page(from):
349
Page(to):
356
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773898 [156677389X]
Language:
English
Call no.:
E23400/200309
Type:
Conference Proceedings

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