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Study of Deposition Processes in PZT Films Grown by Liquid Delivery MOCVD

Author(s):
Kurasawa, M.
Nakabayashi, M.
Nakamura, K.
Maruyama, K.
Eshita, T.
Kurihara, K.
1 more
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. Year:
2003
Page(from):
1403
Page(to):
1410
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

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