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Titanium Phosphide Coatings From the Atmospheric Pressure CVD Reaction of TiCl4 with PRxH3-x (R = cyhex; or R = SiMe3 where x = 3)

Author(s):
Blackman, C.
Carmalt, C.
O'Neill, S.
Parkin, I.
Molloy, K.
Apostolico, L.
1 more
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. date:
2003
Page(from):
1387
Page(to):
1394
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

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