Blank Cover Image

Growth and Characterization of Ti-Al-N Films Prepared by Plasma-Enhanced Atomic Layer Deposition of TiN and AIN

Author(s):
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. date:
2003
Page(from):
1262
Page(to):
1267
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

Similar Items:

Kim, D.-H., Kim, Y.J., Song, Y.S.

Electrochemical Society

S. K. Park, H. Kwack, J. Lee, C. Hwang, H. Chu

Electrochemical Society

Kim, J-H., Kim, J-Y., Park, P-K., Kang, S-W.

Electrochemical Society

Duray, S. J., Buchholz, D. B., Song, S. N., Richeson, D. S., Ketterson, J. B., Marks, T. J., Chang, R. P. H.

Materials Research Society

J. Ahn, J. Kim, J. Roh, S. Kang

Electrochemical Society

Lee, K.-B., Kwak, N.-J., Kim, S.-D., Kim, C.-T., Fu, J., Nahm, M.K., Diaz, R., Lai, C.S., Xu, Z., Han, B.B., Park, …

Electrochemical Society

S. Kim, S. Kwon, S. Kang

Electrochemical Society

Ko, M.-G., Lee, E.-J., Park, J.-W.

Electrochemical Society

Shim, J.H., Cho, N.H., Kim, Y.J., Whang, C.M., Cho, W.S., Yoo, Y.C., Kim, J.G., Kwon, Y.J.

Trans Tech Publications

Heil, S.B.S., Langereis, E., Roozeboom, F., Kemmere, A., Pham, N.P., Sarro, P.M., van-de-Sanden, M.C.M., Kessels, W.M.M.

Materials Research Society

Kuo, Jason S., Rogers, J. W., Jr.

MRS - Materials Research Society

S. Yang, J. Kim, J. Noh, H. Kim, S. Lee, J. Ahn, K. Hwang, Y. Shin, U. Chung, J. Moon, D. Lee, I. Yi, R. Jung, S. Kang

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12