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Synthesis and Structural Characterizations of Vanadium Oxide Thin Films Prepared by MOCVD and ALD

Author(s):
Mantoux, A.
Groult, H.
Doppelt, P.
Badot, J.C.
Balnois, E.
Baffler, N.
Lincot, D.
2 more
Publication title:
Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-8
Pub. Year:
2003
Page(from):
316
Page(to):
324
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773782 [1566773784]
Language:
English
Call no.:
E23400/200308
Type:
Conference Proceedings

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