Critical Issues in Group-III Nitride MOVPE Modeling

Critical Issues in Group-III Nitride MOVPE Modeling

Author(s):

Publication title:

Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-8

Pub. Year:

2003

Page(from):

258

Page(to):

265

Pages:

8

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773782 [1566773784]

Language:

English

Call no.:

E23400/200308

Type:

Conference Proceedings

Details

TDL ID:	ZA00014071
Series ID:	PA00000028
Conf. info. (Name):	International Conference on Chemical Vapor Deposition ; EUROCVD ; Electrochemical Society Meeting
Conf. info. (Number):	16th ; 14th ; 203rd
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2003.04.27-2003.05.02

Similar Items:

1 Conference Proceedings Modeling Analysis of SiC CVD in the Horizontal Hot Wall Reactors Semennikov, A.K., Talalaev, R.A., Vorob'ev, A.N., Makarov, Yu.N. Electrochemical Society	7 Conference Proceedings Detailed Modeling of Metal Organic Vapor Phase Epitaxy of III-V Ternary Compounds in Production-Scale AIX 2400G3 Yakovlev, E.V., Shpolyanskiy, Y.A., Talalaev, R.A., Karpov, S.Y., Makarov, Y.N., Bergunde, T., Lowry, S.A. Electrochemical Society
2 Conference Proceedings Modelling of MOVPE Of Group III-Nitrides in Horizontal Tube Reactor Galjukov, A.O., Egorov, Yu.E., Makarov, Yu.N., Talalaev, R.A., Kirchner, Ch., Kamp, M., Ebling, K.J. Electrochemical Society	8 Conference Proceedings Surface Segregation and Composition Fluctuations in Ammonia MBE and MOVPE of InGaN Karpov, Sergey Yu., Talalaev, Roman A., Yakovlev, Eugene V., Makarov, Yuri N. Materials Research Society
3 Conference Proceedings Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling Y. Shishkin, R.L. Myers-Ward, S.E. Saddow, A. Galyukov, A. Vorob'ev, D. Brovin, D. Bazarevskiy, R. Talalaev, Y.N. … Trans Tech Publications	9 Conference Proceedings Modeling Analysis of SiC CVD in a Planetary Reactor Vorob'ev, A.N., Semennikov, A.K., Zhmakin, A.I., Makarov, Yu.N., Dauelsberg, M., Wischmeyer, F., Heuken, M., Juergensen, … Trans Tech Publications
4 Conference Proceedings Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane Y.N. Makarov, R.A. Talalaev, A.N. Vorob'ev, M.S. Ramm, M.V. Bogdanov Trans Tech Publications	10 Conference Proceedings Spectra of strong scintillation caused by large-scale anisotropic stratospheric irregularities, in spacecraft-based observations (Invited Paper) [6522-11] Fedorova, O. V., Marakasov, D. A., Vorob’ev, V. V. SPIE
5 Conference Proceedings Comprehensive reactor-scale modeling of III-V ternary compound growth by MOVPE Yakovlev, E. V., Talalaev, R. A., Karpov, S. Yu., Shpolyanskiy, Yu. A., Makarov, Yu. N., Lowry, S. A. MRS-Materials Research Society	11 Conference Proceedings Modeling Analysis of Temperature Field and Species Transport Inside the System for Sublimation Growth of SiC in Tantalum Container Egorov,Yu.E., Galyukov,A.O., Gurevich,S.G., Makarov,Yu.N., Mokhov,E.N., Ramm,M.G., Ramm,M.S., Roenkov,A.D., Segal,A.S., … Trans Tech Publications
6 Conference Proceedings Modeling Analysis of Gas-Phase Generated Silicon Clusters in a Rotating Disk CVD Reactor Vorob'ev, A., Makarov, N.Y., Karpov, S.U. Electrochemical Society	12 Conference Proceedings Quasi-Thermodynamic Models of Surface Chemistry: Application to MOVPE of III-V Ternary Compounds Kampov, S.Yu., Yakovlev, E.V., Talobey, R.A., Shopolyanskiy, R.A., Makurov, Y.N., Lowry, S.A. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12