Extremely Scaled Ultra-Thin Body and FinFET CMOS Devices*
- Author(s):
Balasubramanion, S. Chang, L. Choi, Y.-K. Ha, D. Lee, J. Ranade, P. Xiong, S. Bokor, J. Hu, C. King, T.-J. - Publication title:
- ULSI Process Integration : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-6
- Pub. Year:
- 2003
- Page(from):
- 534
- Page(to):
- 545
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773768 [1566773768]
- Language:
- English
- Call no.:
- E23400/200306
- Type:
- Conference Proceedings
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