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60-nm Gate Length SOI CMOS Technology Optimized for 'System-on-a- SOI-Chip' Solution*

Author(s):
Imai, K.
Maruyama, S.
Suzuki, T.
Kudo, T.
Miyake, S.
Ikeda, M.
Abe, T.
Masuda, S.
Tanabe, A.
Lee, J.-W.
Shibahara, K.
Yokoyama, S.
Ooka, H.
8 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
Pub. date:
2003
Page(from):
493
Page(to):
502
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
Language:
English
Call no.:
E23400/200306
Type:
Conference Proceedings

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