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Integration Issues with High k Gate Stacks*

Author(s):
Osburn, C.M.
Han, S.K.
Kim, I.
Campbell, S.A.
Garfunkel, E.
Gustafson, T.
Hauser, J.
King, T.-J.
Liu, Q.
Ranade, P.
Kingon, A.
Kwong, D.-L.
Lee, S.J.
Lee, C.H.
Lee, J.
Onishi, K.
Kang, C.S.
Choi, R.
Cho, H.
Nich, R.
Lucovsky, G.
Hong, J.G.
Ma, T.P.
Zhu, W.
Luo, Z.
Maria, J.P.
Wicaksana, D.
Misra, V.
Lee, J.J.
Suh, Y.S.
Parksons, G.
Niu, D.
Stemmer, S.
28 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
Pub. Year:
2003
Page(from):
375
Page(to):
390
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773768 [1566773768]
Language:
English
Call no.:
E23400/200306
Type:
Conference Proceedings

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