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Analysis of HALO implant influence on the self-heating and self-heating enhanced impact ionization on 0.13 μm floating-body partially-depleted SOI MOSFET at low temperature

Author(s):
Pavanello, M.A.
Martino, J.A.
Simoen, E.
Mercha, A.
Clacys, C.
van Meer, H.
De Meyer, K.
2 more
Publication title:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-5
Pub. date:
2003
Page(from):
389
Page(to):
394
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
Language:
English
Call no.:
E23400/200305
Type:
Conference Proceedings

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