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60-nm gate length SOI CMOS technology optimised for 'System-on-a-SOI-chip' solution

Author(s):
Imai, K.
Maruyama, S.
Suzuld, T.
Kudo, T.
Miyake, S.
Ikeda, M.
Abe, T.
Masuda, S.
Tanabe, A.
Lee, J-W.
Shibahara, K.
Yokoyania, S.
Qoka, H.
8 more
Publication title:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-5
Pub. date:
2003
Page(from):
149
Page(to):
158
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
Language:
English
Call no.:
E23400/200305
Type:
Conference Proceedings

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