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Effect of silicon nitride and silicon dioxide bonding on the residual stress in layer-transferred SOI

Author(s):
Tiberj, A.
Caniassel, I.
Planes, N.
Stoemenos, Y.
Moriceau, H.
Rayssac, O.
1 more
Publication title:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-5
Pub. Year:
2003
Page(from):
117
Page(to):
122
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
Language:
English
Call no.:
E23400/200305
Type:
Conference Proceedings

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