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Status of 300 mm SOI material: comparisons with 200 mm

Author(s):
Hovel, H.
Alnionte, M.
Tsai, P.
Lee, J.D.
Maurer, S.
Kleinhenz, R.
Schepis, D.
Murphy, R.
Ronsheim, P.
Domemcucci, A.
Rettinger, J.
Sadana, D.
7 more
Publication title:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-5
Pub. Year:
2003
Page(from):
75
Page(to):
80
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
Language:
English
Call no.:
E23400/200305
Type:
Conference Proceedings

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