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Replacing the BOX with buried alumina: improved thermal dissipation in SOI MOSFETs

Author(s):
Oshima, K.
Cristoloveanu, S.
Guillaumot, B.
Carval, G.be
Lwai, H.
Mazure, C.
Kang, M.S.
Rae, Y.H.
Kwon, J.W.
Deleonibus, S.
Lee, J.H.
6 more
Publication title:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-5
Pub. date:
2003
Page(from):
45
Page(to):
50
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773751 [156677375X]
Language:
English
Call no.:
E23400/200305
Type:
Conference Proceedings

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