Nitrogen Concentration Measurement of CZ Silicon
- Author(s):
- Publication title:
- Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-3
- Pub. Year:
- 2003
- Page(from):
- 516
- Page(to):
- 526
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773485 [1566773482]
- Language:
- English
- Call no.:
- E23400/200303
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Measurement of Nitrogen Concentration in CZ-Si below 1014/cm3 by IR Absorption Spectroscopy
Electrochemical Society |
2
Conference Proceedings
Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Electrochemical Society |
8
Conference Proceedings
Standardization of Nitrogen Analysis in CZ-Si by Charged Particle Activation Analysis
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
10
Conference Proceedings
Infrared Absorption Measurement of Carbon Concentration in Silicon Crystals
Electrochemical Society |
Electrochemical Society |
11
Conference Proceedings
Infrared Absorption Spectroscopy of Complexes in Low Carbon Concentration, Low Dose Irradiated CZ Silicon Crystal
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |