Spark Source Mass Spectrometric Analysis of Low Carbon Contents in Crystalline Silicon

Spark Source Mass Spectrometric Analysis of Low Carbon Contents in Crystalline Silicon

Author(s):

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-3

Pub. Year:

2003

Page(from):

83

Page(to):

87

Pages:

5

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773485 [1566773482]

Language:

English

Call no.:

E23400/200303

Type:

Conference Proceedings

Details

TDL ID:	ZA00014066
Series ID:	PA00000028
Conf. info. (Name):	ALTECH ; Meeting of the Electrochemical Society ; Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	4th (2003) ; 203rd ; 2002 ; 202nd
Conf. info. (Venue):	Paris, France ; Paris, France ; Salt Lake City, UT, USA ; Salt Lake City, UT, USA
Conf. info. (Date):	2003.04.27-2003.05.02 ; 2003.04.27-2003.05.02 ; 2002.10.21-2002.10.25 ; 2002.10.21-2002.10.25

Similar Items:

1 Conference Proceedings Spark Source Mass Spectrometric Analysis of Low Carbon Contents in Crystalline Silicon Wiedemann, B., Meyer, J.D., Alt, H.C,, Riemann, H. SPIE-The International Society for Optical Engineering	7 Conference Proceedings ANALYSIS OF THE AMORPHOUS SILICON CARBIDE/CRYSTALLINE SILICON INTERFACE Rahman, M. M.., Harjono, T., Lui, K. H., Pagaduan, F. E., Inokawa, H., Yang, C. Y., Sigiarto, D. Materials Research Society
2 Conference Proceedings Material Characterization Issues of Nitrogen in Silicon H.C. Alt Electrochemical Society	8 Conference Proceedings Effect of the Coupling of Recovery and Precipitation on the Recrystallization Behavior of Ti-Stabilized Extra Low Carbon Steels Na, E.H., Choi, J.Y., Sung, B. S., Lee, H.C. Trans Tech Publications
3 Conference Proceedings The Effective Mass Donor in Galliumnitride Alt,H.C., Meye,B.K., Volm,D., Graber,A., Drechsler,M., Hofmann,D.M., Detchprohlm,T., Amano,A., Akasaki,I. Trans Tech Publications	9 Conference Proceedings Chemical Vapor Deposition Epitaxy of Silicon and Silicon-Carbon Alloys at High Rates and Low Temperatures using Neopentasilane J. C. Sturm, K. H. Chung, N. Yao, B. Sanchez, K. K. Singh, D. Carison, S. Kuppurao Electrochemical Society
4 Conference Proceedings EFFECTS OF SUBSTRATE PARAMETERS ON AMORPHOUS- CRYSTALLINE SILICON INTERFACE Vetrella, U.B., Cohen, J.D. Materials Research Society	10 Conference Proceedings Bioactive Trace Metals and Trace Metal Stable Isotopes: Quantitative Analysis Using Mass Spectrometric Techniques Christie, D. B., Hall, M., Moynihan, C. M., Hambidge, K. M., Fennessey, P. V. American Chemical Society
5 Conference Proceedings Electronic Transitions in Mixed Phase Crystalline/Amorphous Silicon in the Low Crystalline Fraction Regime Abelson, J. R., Chen, C-C., Cohen, J. D., Hollar, E., Jin, H-C., Kwon, D., Robertson, I. Materials Research Society	11 Conference Proceedings Fracture Strength Characterization and Failure Analysis of Silicon Dies Wu, J.D., Huang, C.Y., Liao, C.C., Ho, S.H. IMAPS
6 Conference Proceedings Spectroscopy of nitrogen-related ccnters in gallium arsenide Alt,H.Ch., Wiedemann,B., Bethge,K. Trans Tech Publications	12 Conference Proceedings Complex Analysis of Interaction between Dislocations and Pinning Points in Mo with Low Carbon Contents Levin,D.M., Golovin,S.A. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12