Blank Cover Image

Properties of Annealed Silicon Oxynitride Layers for Optical Applications

Author(s):
Publication title:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-2
Pub. date:
2003
Page(from):
406
Page(to):
417
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773478 [1566773474]
Language:
English
Call no.:
E23400/200302
Type:
Conference Proceedings

Similar Items:

Worhoff, K., Roeloffzen, C.G.H., de Ridder, R.M., Sengo, G., Hilderink, L.T.H., Driessen, A.

SPIE - The International Society of Optical Engineering

Wager, J.F., Lim, S., Ryu, J.H., Marlia, J., Remley, K., Lite, K., Plant, T.K., Weisshaar, A., Casas, L.M.

Electrochemical Society

Roeloffzen, C.G.H., Ridder, R.M., Sengo, G., Woerhoff, K., Driessen, A.

SPIE-The International Society for Optical Engineering

Jang, J., Kim, T.G., Koh, S.O., Song, H.K., Park, K.C., Chung, M.H., Kim, S.C., Kwon, J.H., Kim, J.D.

Materials Research Society

Germann, R., Salemink, H.W.M., Beyeler, R., Bona, G.L., Horst, F., Massarek, I., Offrein, B.J.

Electrochemical Society

Karamcheti, A., Watt, V. H. C., Luo, T. Y., Brady, D., Shaapur, F., Vishnubhotla, L., Gale, G., Huff, H. R., Jackson, M. …

MRS-Materials Research Society

Hussein, M. G., Worhoff, K., Sengo, G., Driessen, A.

Electrochemical Society

C.M. Lee, Y.J. Cho, H.J. Kim, W.W. Lee, H.W. Kim, C.K. Hwangbo, J.G. Lee

Trans Tech Publications

Worhoff, K., Lambeck, P.V., Klunder, D.J.W., de Ridder, R.M., Heidman, R.G., Roeloffzen, C.G.H., Hussein, G.M., Musa, …

Electrochemical Society

Al-Jumaily, G.A., Mooney, T.A., Spurgeon, W.A., Dauplaise, H.M.

Materials Research Society

Mohite, K.C., Nouveau, C., Pawar, S.T., Pawar, B.N., Jadkar, S.R., Takwale, M.G.

SPIE - The International Society of Optical Engineering

Gusev, E.P., D'Emic, C.P., Zabel, T.H., Copel, M.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12