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Direct-Write Deposition of Silicon Oxide - The Express Lane towards patterned thin Films

Author(s):
Wanzenboeck, H.D.
Harasek, S.
Bertagnolli, E.
Gritsch, M.
Hutter, H.
Brenner, J.
Stoeri, H.
Grabner, U.
Hammer, G.
Pongratz, P.
5 more
Publication title:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-2
Pub. Year:
2003
Page(from):
369
Page(to):
380
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773478 [1566773474]
Language:
English
Call no.:
E23400/200302
Type:
Conference Proceedings

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