Dipoles in SiO2: Border Traps or Not?

Dipoles in SiO2: Border Traps or Not?

Author(s):

Fleetwood, D.M.

Publication title:

Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2003-2

Pub. Year:

2003

Page(from):

291

Page(to):

307

Pages:

17

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773478 [1566773474]

Language:

English

Call no.:

E23400/200302

Type:

Conference Proceedings

Details

TDL ID:	ZA00014065
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Conf. info. (Number):	7th
Conf. info. (Venue):	Paris, France
Conf. info. (Date):	2003.04.28-2003.05.02

Similar Items:

1 Conference Proceedings Si/SiO2 and SiC/SiO2 Interfaces for MOSFETs - Challenges and Advances Pantelides, S.T., Wang, S., Franceschetti, A., Buczko, R., Di Ventra, M., Rashkeev, S.N., Tsetseris, L., Evans, M.H., … Trans Tech Publications	7 Conference Proceedings Total dose radiation hardness of double-gate ultra-thin SOI MOSFETs Cirba, C.R., Cristoloveanu, S., Schrimpf, R.D., Feldman, L.C., Fleetwood, D.M., Galloway, K.F. Electrochemical Society
2 Conference Proceedings Hydrogen Model for Negative Bias Temperature Instabilities in MOS Gate Dielectrics Fleetwood, D.M., Zhou, X.J., Tsetseris, L., Pantelides, S.T., Schrimpf, R.D. Electrochemical Society	8 Conference Proceedings Nitrogen Content and Interface Trap Reduction in SiO2/4H-SiC McDonald, K., Weller, R.A., Pantelides, S.T., Feldman, L.C., Chung, G.Y, Tin, C.C., Williams, J.R. Electrochemical Society
3 Conference Proceedings Defect-related Issues in High-Dielectics Pantelides, S. T, Evans, M. H, Fleetwood, D. M, Gusev, E. P, Joannopoulos, J. D, Lu, Z, Pennycook, S. J, Rashkeev, … Springer	9 Conference Proceedings Recent radiation issues in silicon-on-insulator devices Alles, M.L., Ball, D.R., Schrimpf, R.D., Fleetwood, D.M., Reed, R.A., Jun, B. Electrochemical Society
4 Conference Proceedings Field-Induced Reactions of Water Molecules at Si-Dielectric Interfaces Tsetseris, L., Zhou, X., Fleetwood, D. M., Schrimpf, R. D., Pantelides, S. T. Materials Research Society	10 Conference Proceedings Nitrogen and Hydrogen Induced Trap Passivation at the SiO2/4H-SiC Interface Dhar, S., Wang, S.R., Ahyi, A.C., Isaacs-Smith, T., Pantelides, S.T., Williams, J.R., Feldman, L.C. Trans Tech Publications
5 Conference Proceedings Theory of the nucleation and growth of SiO2 in Si: application to SOI Pantelides, S.T., Ramamoorthy, M. Electrochemical Society	11 Conference Proceedings Passivation of the 4H-SiC/SiO2 Interface with Nitric Oxide Williams, J.R., Chung, G.Y., Tin, C.C., McDonald, K., Farmer, D., Chanana, R.K., Weller, R.A., Pantelides, S.T., … Trans Tech Publications
6 Conference Proceedings Investigation of second-harmonic generation for SOI wafer metrology Pasternak, R., Jun, B., Schrimpf, R.D., Fleetwood, D.M., Alles, M.A., Dolan, R.P., Standley, R.W., Tolk, N.H. Electrochemical Society	12 Conference Proceedings Passivation of the 4H-SiC/SiO2 Interface with Nitric Oxide Williams, J.R., Chung, G.Y., Tin, C.C., McDonald, K., Farmer, D., Chanana, R.K., Weller, R.A., Pantelides, S.T., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12