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EPR Studies of SiCISiO2 Interfaces in n-type 4H-and 6H- Oxidized Porous SIC

Author(s):
von Bardeleben, H.J.
Cantin, J.L.
Mynbaeva, M.
Saddow, S.E.
Shishkin, Y.
Devaty, R.P.
Choyke, W.J.
2 more
Publication title:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-2
Pub. date:
2003
Page(from):
39
Page(to):
54
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773478 [1566773474]
Language:
English
Call no.:
E23400/200302
Type:
Conference Proceedings

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