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Investigation of ru Thin Films Prepared by Chemical Vapor Deposition as Bottom Electrodes for Memory Applications

Author(s):
  • Kang, S.Y. ( (Seoul National University, School of Materials Science & Engineering) )
  • Lim, H.J. ( (Seoul National University, School of Materials Science & Engineering) )
  • Hwang, C.S. ( (Seoul National University, School of Materials Science & Engineering) )
  • Kim, H.J. ( (Seoul National University, School of Materials Science & Engineering) )
Publication title:
Dielectrics in emerging technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-1
Pub. Year:
2003
Page(from):
305
Page(to):
312
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773461 [1566773466]
Language:
English
Call no.:
E23400/200301
Type:
Conference Proceedings

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