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New Trends in Silicon Thin Films and Applications

Author(s):
  • Klcider, J.-P. ( (Laboratoire de Genie Electrique de Paris, SUPELEC) )
  • Roca i Cabarrocas, P. ( (Laboratoire de Physique des Interfaces et des Couches Minces) )
  • Guedj, C. ( (Laboratoire d'Electronique de Technologie et d'Instrurnentation, CEA-Grenoble) )
Publication title:
Dielectrics in emerging technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-1
Pub. date:
2003
Page(from):
265
Page(to):
279
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773461 [1566773466]
Language:
English
Call no.:
E23400/200301
Type:
Conference Proceedings

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