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Nanosale characterization and local electromechanical properties of ferroelectric films for MEMS

Author(s):
  • Kholkin, A. ( (Department of Ceramics and Glass Engineering, University of Aveiro) )
  • Shvartsman, V. ( (Department of Ceramics and Glass Engineering, University of Aveiro) )
  • Emelyanov, A. ( (Department of Ceramics and Glass Engineering, University of Aveiro) )
  • Safari, A. ( (Department of Ceramics and Materials Engineering, Rutgers University) )
Publication title:
Dielectrics in emerging technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-1
Pub. Year:
2003
Page(from):
145
Page(to):
159
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773461 [1566773466]
Language:
English
Call no.:
E23400/200301
Type:
Conference Proceedings

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