Effect of Etch Holes on the Performance of Ferromagnetic MEMS

Effect of Etch Holes on the Performance of Ferromagnetic MEMS

Author(s):

Publication title:

Magnetic materials, processes, and devices VII and electrodeposition of alloys : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2002-27

Pub. Year:

2002

Page(from):

201

Page(to):

213

Pages:

13

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773942 [1566773946]

Language:

English

Call no.:

E23400/200227

Type:

Conference Proceedings

Details

TDL ID:	ZA00014063
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	7th ; 202nd
Conf. info. (Venue):	Salt Lake City, UT, USA
Conf. info. (Date):	2003.10.21-2003.10.24

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