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Plasma Processing For Microcontour Control In Thick Polymer Films;

Author(s):
Werbaneth, P. ( Tegal Petaluma, CA )  
Publication title:
Proceedings from the tenth Meeting of the Symposium on Polymers for Microelectronics [May 8th, 9th, & 10th, 2002]
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-16
Pub. Year:
2002
Page(from):
673
Page(to):
684
Pages:
12
Pub. info.:
[S.l.]: Electrochemical Society
ISSN:
01616374
Language:
English
Call no.:
E23400/200216
Type:
Conference Proceedings

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