Blank Cover Image

Reactive Ion Etching and Via Opening in Low Permittivity Inter-level Dielectric Films for Pixelated TFT Arrays

Author(s):
Publication title:
Thin Film Transistor Technologies VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-23
Pub. Year:
2002
Page(from):
224
Page(to):
230
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773850 [1566773857]
Language:
English
Call no.:
E23400/200223
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Synthesis And Characterization Of Methyl- Triethoxysilane Based Low Permittivity (Low-K) Polymeric Dielectrics

Gu, Z., Jeyakumar, R., Sivoththaman, S., Nathan, A.

Materials Research Society
7 Conference Proceedings Low-dielectric-constant photoresists for insulation on TFT array

Lee,R.-J., Wu,Y.-C., Chen,S.-L., Lin,S.-S., Chien,H.-W.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Effect Of Ion-Accelerated Plasma Hydrogenation And Thermal Treatments On Hydrogen Silsesquioxane (HSQ) Low-K Dielectric Films

Jeyakumar, R., Ren, L., Sivoththaman, S.

Materials Research Society
8 Conference Proceedings Threshold Voltage Performance of a-Si:H TFTs for Analog Applications

Karim, K. S., Sakariya, K., Nathan, A.

Materials Research Society
3 Conference Proceedings Active Pixel TFT Array for Digital Imaging Applications

Karim, K.S., Nathan, A.

Electrochemical Society
9 Conference Proceedings Amorphous Silicon Active Pixel Sensor Readout Circuit Architectures For Medical Imaging

Karim, K.S., Nathan, A., Rowlands, J.A.

Materials Research Society
4 Conference Proceedings a-Si:H TFT Circuit Integration on Glass and Plastic Substrates

Nathan, A., Servati, P., Karim, K.S., Striakhilev, D., Sazonov, A.

Electrochemical Society
10 Conference Proceedings Alternate pixel architectures for large-area medical umaging (Michael B. Merickel Best Student Paper Award)

Karim,K.S., Nathan,A., Rowlands,J.A.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings On-Pixel Amorphous Silicon Amplifier For Digital Imaging

Karim, K.S., Nathan, A.

Electrochemical Society
11 Conference Proceedings Electromigration in Two-Level Cu Interconnections with a Low Dielectric Constant Inter-Level Insulator

Hu, C-K., Gignac, L., Liniger, F., Rosenberg, R., Agarwala, B., Rathore, H.S., Chen, X.

Electrochemical Society
6 Conference Proceedings Effect of Reactive-Ion Etching on Thermal Oxide Properties on 4H-SiC

Matocha, K.S., Cowen, C.S., Beaupre, R., Tucker, J.B.

Trans Tech Publications
12 Conference Proceedings Reactive Ion Etching of the Fluorinated Polyimide Film

Lee, Y. K., Murarka, S. P.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12