Base Contact Issues of Si/SiGe-Heterojunction Bipolar Transistors with Emphasis on Source/Drain Contacts of CMOS Devices

Base Contact Issues of Si/SiGe-Heterojunction Bipolar Transistors with Emphasis on Source/Drain Contacts of CMOS Devices

Author(s):

Publication title:

Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2002-22

Pub. Year:

2002

Page(from):

103

Page(to):

108

Pages:

6

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773799 [1566773792]

Language:

English

Call no.:

E23400/200222

Type:

Conference Proceedings

Details

TDL ID:	ZA00014055
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics ; Meeting of the Electrochemical Society
Conf. info. (Number):	2002 ; 202nd
Conf. info. (Venue):	Salt Lake City, UT, USA
Conf. info. (Date):	2002.10.20-2002.10.24

Similar Items:

1 Conference Proceedings SiGe Heterojunction Bipolar Transistors on Insulator Ashburn, P., El Mubarek, H.A.W., Bonar, J.M., Redinan-White, W. Electrochemical Society	7 Conference Proceedings LOW TEMPERATURE CLEAN FOR Si/SiGe EPITAXY FOR CMOS INTEGRATION OF HETEROJUNCTION BIPOLAR TRANSISTORS Wolansky, D., Tillack, B., Blum, K., Bolze, K.D., Glowatzki, K.D., Koepke, K., Kroeger, D., Kurps, R., Ritter, G., … Electrochemical Society
2 Conference Proceedings SiGe HETEROJUNCTION BIPOLAR TRANSISTORS Arienzo, Maurizio, Comfort, James H., Crabbe, Emmanuel F., Harame, David L., Iyer, Subramanian S., Meyerson, Bernard S., … Materials Research Society	8 Conference Proceedings *SiGe HETEROJUNCTIONS TRANSISTORS AND OPTOELECTRONIC DEVICES Arienzo, Maurizio, Comfort, James H., Crabbe, Emmanuel F., Harame, David L., Iyer, Subramanian S., Kesan, Vijay P., … Materials Research Society
3 Conference Proceedings SiGe heterojunction bipolar transistors on insulating substrates Hall, S., Buiu, O., Mitrovic, I.Z., Mubarek, H.A. W. El, Ashburn, P., Bain, M., Gamble, H.S., Wang, Y., Hemment, P.L.F., … Kluwer Academic Publishers	9 Conference Proceedings Ohmic Contacts to p-Type III-Ⅴ Semiconductors for the Base of Heterojunction Bipolar Transistors E. Lysczek, S. E. Mohney, S. Wang, J. Robinson Electrochemical Society
4 Conference Proceedings Copper-Based Ohmic Contacts for the SiGe/Si Heterojunction Bipolar Transistor (HBT) Structure Das, K., Alterovitz, S. A. MRS - Materials Research Society	10 Conference Proceedings Ti/Pt BASED CONTACTS TO HETEROJUNCTION BIPOLAR TRANSISTORS Kalkur, T. S., Wright, P. D., Ko, S K., Lu, Y. C., Casas, L., Jones, K. A. Materials Research Society
5 Conference Proceedings In-BASED OHMIC CONTACTS TO THE BASE LAYER OF GaAs-AlGaAs HETEROJUNCTION BIPOLAR TRANSISTORS Ren, F., Pearton, S. J., Hobson, W. S., Fullowan, T. R., Emerson, A. B., Yanof, A. W., Schleich, D. M. Materials Research Society	11 Conference Proceedings Increased-functionality VLSI-compatible Devices Based on Backward-diode Floating-base Si/SiGe Heterojunction Bipolar Transistors Gribnikov S. Z., Luryi S., Zaslavsky A. Kluwer Academic Publishers
6 Conference Proceedings Development of SiGe/Si film heterojunction bipolar transistors Guo,L., Li,K., Liu,D., Zhang,J., Yi,Q., d'Avitaya,F.A., Xu,S. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Device Characteristics of the PnP AlGaAs/InGaAsN/GaAs Double Heterojunction Bipolar Transistor Chang, P.C., Li, N.Y., Laroche, J.R., Baca, A.G., Hou, H.Q., Ren, F. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12