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Fabrication of 3-D Structure on P-Type Silicon Using Electrochemical Etching

Author(s):
Izuo, S.
Saitoh, F.
Obji, H.
Fukami, T.
French, P.J.
Tsutsumi, K.
1 more
Publication title:
High purity silicon VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-20
Pub. Year:
2002
Page(from):
387
Page(to):
396
Pages:
10
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
Language:
English
Call no.:
E23400/200220
Type:
Conference Proceedings

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