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Electrical and Structural Characterization of Silicon on Silicon Bonded Interfaces

Author(s):
McCann, P.
MeKeever, J.
Nicholson, D.
Ruddell, F.
Gamble, H.S.
Nevin, W.A.
1 more
Publication title:
High purity silicon VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-20
Pub. date:
2002
Page(from):
369
Page(to):
376
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
Language:
English
Call no.:
E23400/200220
Type:
Conference Proceedings

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