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Surface Structure of Hydrogen Annealed Silicon Wafer Using Ozonized Water and Dilute HF Cleaning

Author(s):
Kurita, H.
Izunome, K.
Nagahama, H.
Ino, T.
Yamabe, J.
Hayamizu, N.
Sakurai, N.
2 more
Publication title:
High purity silicon VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-20
Pub. date:
2002
Page(from):
155
Page(to):
170
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773447 [156677344X]
Language:
English
Call no.:
E23400/200220
Type:
Conference Proceedings

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