Segregation of Nitrogen in Cz Silicon

Segregation of Nitrogen in Cz Silicon

Author(s):: Inoue, N.
Publication title:: High purity silicon VII : proceedings of the international symposium
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 2002-20
Pub. Year:: 2002
Page(from):: 127
Page(to):: 132
Pages:: 6
Pub. info.:: Pennington, N.J.: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566773447 [156677344X]
Language:: English
Call no.:: E23400/200220
Type:: Conference Proceedings

Details

TDL ID:	ZA00014053
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on High Purity Silicon ; Meeting of the Electrochemical Society
Conf. info. (Number):	7th ; 202nd
Conf. info. (Venue):	Salt Lake City, Utah, USA
Conf. info. (Date):	2002.10.20-2002.10.25

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