Effect of Oxygen and Nitrogen Additions on Silicon Nitride Reactive Ion Etching in Fluorine Containing Plasmas
- Author(s):
- Publication title:
- Plasma processing XIV : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-17
- Pub. Year:
- 2002
- Page(from):
- 263
- Page(to):
- 276
- Pages:
- 14
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773416 [1566773415]
- Language:
- English
- Call no.:
- E23400/200217
- Type:
- Conference Proceedings
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