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Characterization of NF3 Chamber Cleans on Multiple CVD Platforms

Author(s):
Goolsby, B. ( (Motorola) )
Vartanian, V. ( (Motorola) )
Mendicino, L. ( (Motorola) )
Rivers, J. ( (Motorola) )
Vires, J. ( (Motorola) )
Soyemi, A. ( (Motorola) )
Sun, S.P. ( (Advanced Micro Devices) )
Turner, M. ( (Advanced Micro Devices) )
Esber, C. ( (Advanced Micro Devices) )
4 more
Publication title:
Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-15
Pub. Year:
2002
Page(from):
127
Page(to):
138
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773379 [1566773377]
Language:
English
Call no.:
E23400/200215
Type:
Conference Proceedings

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