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Rapid Thermal Silicidation in Silicon-Germanium and SOI Devices

Author(s):
Chen, Li.
Wu, W.W
Liu, C.H.
Chiang, T.F.
Cheng, S.L.
Lee, S.W.
1 more
Publication title:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-11
Pub. date:
2002
Page(from):
441
Page(to):
454
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773348 [1566773342]
Language:
English
Call no.:
E23400/200211
Type:
Conference Proceedings

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