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Advanced Annealing for Sub-130 nm Junction Formation

Author(s):
Gelpey, J.C.
Elliott, K.
Gamin, D.
McCoy, S.
Ross, J.
Downey, D.F.
Arevalo, E.A.
2 more
Publication title:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-11
Pub. Year:
2002
Page(from):
313
Page(to):
324
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773348 [1566773342]
Language:
English
Call no.:
E23400/200211
Type:
Conference Proceedings

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