Blank Cover Image

In-line Electrical Metrology for High-K Gate Dielectrics Deposited by Atomic Layer Chemical Vapor Deposition

Author(s):
De Witte, H.
Passefort, S.
Besling, W.
Maes, J.W.H.
Eason, K.
Youngand, E.
Heyns, M.
2 more
Publication title:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-11
Pub. date:
2002
Page(from):
153
Page(to):
162
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773348 [1566773342]
Language:
English
Call no.:
E23400/200211
Type:
Conference Proceedings

Similar Items:

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Zhao, C., Bijjs, B., Dortu, F., DeGendt, S., Caymax, M, Heyns, M, Besling, W, Maes, J.W.

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

V. S. Chang, Y. Hou, P. Hau, P. Lim, L. Yao, F. Yen, C. Hung, H. Lin, J. Jiang, Y. Jin, C. Chen, H. Tao, S. Chen, S. …

Electrochemical Society

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society

Zhao, C., Rittersma, Z. M., Van Berkum, J. G. M., Snijders, J. H. M., Hendriks, A., Breimer, P., Groat, P., Maes, J. W., …

Electrochemical Society

Boehringer, M., Hauber, J., Passefort, S., Eason, K.

SPIE-The International Society for Optical Engineering

S.W. Kuk, S.H. Bang, I.H. Kim, S.Y. Jeon, H.T. Jeon, H.H. Park, H.J. Chang

Trans Tech Publications

Bohringer, M., Hauber, J., Passefort, S., Eason, K.

Electrochemical Society

N. Van Hoornick, H. De Witte, T. Hitters, C. Zhao, T. Canard, H. Huatori, J. Swerts, T. Schram, J. Maes, S. De Gendt, M. …

Electrochemical Society

Zhao, C., Brijs, B., Dortu, F., DeGendt, S., Caymax, M., Heyns, M., Besling, W., Maes, J.W.

SPIE-The International Society for Optical Engineering

Carter, R.J., Tsai, W., Young, E., Caymax, M., Maes, J.W., Chen, P.J., Delabie, A., Zhao, C., Gendt, S.De, Heyns, M.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12