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High Temperature Stability of High-K Dielectrics: Thermal Processing and Kinetics

Author(s):
Young, E.W.A.
Chen, J.
Cosnier, V.
Lysagh, P.
Maes, J.W.
Roozeboom, F.
Zhao, C.
Carter, R.
Richard, O.
Conard, T.
5 more
Publication title:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-11
Pub. Year:
2002
Page(from):
125
Page(to):
136
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773348 [1566773342]
Language:
English
Call no.:
E23400/200211
Type:
Conference Proceedings

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