Improvements in Focused Ion Beam Micro-machining of Interconnect Materials
- Author(s):
- Publication title:
- Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-8
- Pub. Year:
- 2002
- Page(from):
- 404
- Page(to):
- 411
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773287 [1566773288]
- Language:
- English
- Call no.:
- E23400/2002-8
- Type:
- Conference Proceedings
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