Piezoresistive Micro-Electro-Mechanical Application in Diamond Films
- Author(s):
- Publication title:
- Microfabricated systems and MEMS VI : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-6
- Pub. Year:
- 2002
- Page(from):
- 77
- Page(to):
- 83
- Pages:
- 7
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773720 [1566773725]
- Language:
- English
- Call no.:
- E23400/2002-6
- Type:
- Conference Proceedings
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