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An Assessment of Microfabricaton to Sensor Development and the 1 Integration of the Sensor Microsystem

Author(s):
Liu, C.-C.
O'Connor, E.
Strohl, K.P.
Klann, K.R
Ghiurcan, G.A.
Hunter, G.
Dudik, L
Shao, M.J.
3 more
Publication title:
Microfabricated systems and MEMS VI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-6
Pub. Year:
2002
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773720 [1566773725]
Language:
English
Call no.:
E23400/2002-6
Type:
Conference Proceedings

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