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Annealing Behavior of Ar Implanted GaN

Author(s):
Luo, B.
Johnson, J.W.
Ren, F.
Allums, K.K.
Abernathy, C.R.
Pearton, S.J.
Dwivedi, R.
Fogarty, TN
Wilkins, R.
Dabiran, A.M
Wowchack, A.M.
Polley, C.J.
Chow, P.P.
Baca, A.G.
9 more
Publication title:
State-of-the-art program on compound semiconductors XXXVI and wide bandgap semiconductors for photonic and electronic devices and sensors II : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-3
Pub. date:
2002
Page(from):
198
Page(to):
206
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773690 [1566773695]
Language:
English
Call no.:
E23400/2002-3
Type:
Conference Proceedings

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