Blank Cover Image

EFFECTIVE INTRINSIC GETTERING OF COPPER DURNG A SUB-QUARTER MICRON CMOS PROCESS

Author(s):
Bae, K-M.
Kim, J-R.
Hong, Y-K.
So, S-I.
Lee, S-C.
Kim, S-S.
Ha, S-W.
Koh, C-G.
Pyi, S-H.
Lee, D-M.
5 more
Publication title:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-2
Pub. date:
2002
Page(from):
786
Page(to):
792
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
Language:
English
Call no.:
E23400/2002-2
Type:
Conference Proceedings

Similar Items:

Bae, K-M., Kim, J-R., Hong, Y-K., So, S-I., Lee, S-C., Kim, S-S., Ha, S-W., Koh, C-G., Pyi, S-H., Lee, D-M.

Electrochemical Society

Lee,K.H., Chung,H.B., Kim,D.H., Yoo,H.J.

SPIE-The International Society for Optical Engineering

Bae, K.-M., Kim, J.-R., Lee, D.-M., Kim, S-S., Koh, C.-G., Pyi, S-H.

Electrochemical Society

Lee,G., Koh,C.-W., Hong,S.-E., Jung,J.-C., Jung,M.-H., Kim,H.-S., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Bae,K.-M., Kim,J.-R., Lee,D.-M., Kim,S.-S., Koh,C.-G., Pyi,S.-H.

Electrochemical Society, SPIE-The International Society for Optical Engineering

Hong,S.-E., Jung,M.-H., Jung,J.-C., Lee,G., Kim,J.-S., Koh,C.-W., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Sallagoity, P., Gaillard, F., Rivoire, M., Paoli, M., Brouquet, P., Haond, M., McClathie, S., Beekmann, K., Kiermasz, …

Electrochemical Society

Hotta,S., Onozuka,T., Fukumoto,K., Shirai,S., Okazaki,S.

SPIE-The International Society for Optical Engineering

Lee, W., Kim, Jung Joo, Kim, Jun Junki, Park, J., Kwon, H., Park, H., Rha, S.

Materials Research Society

Hong,S., Kim,E., Jiang,Z.-T., Bae,B.-S., No,K., Shin,W., Lim,S.-C., Woo,S.-G., Koh,Y.-B.

SPIE-The International Society for Optical Engineering

Lim,S.-C., Kye,J.-W., Woo,S.-G., Kim,S.-G., Kang,H.-Y., Han,W.-S., Koh,Y.-B.

SPIE-The International Society for Optical Engineering

Kim, M. -S., Kim, H. -G., Pyi, S. -H., Kim, H. -S., Baik, K. -H., Choi, I. -H.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12