Blank Cover Image

INVITED: UNIFIED THEORY OF THERMAL SILICON OXIDE GROWTH

Author(s):
Publication title:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-2
Pub. Year:
2002
Page(from):
578
Page(to):
591
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
Language:
English
Call no.:
E23400/2002-2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings INVITED: UNIFIED THEORY OF THERMAL SILICON OXIDE GROWTH

Uematsu, M., Kageshima, H., Shiraishi, K.

Electrochemical Society
7 Conference Proceedings Theoretical Investigation of Effective Quantum Dots Induced by Strain in Semiconductor Wires

Shiraishi, K., Nagase, M., Horiguchi, S., Kageshima, H.

MRS - Materials Research Society
2 Conference Proceedings Theory of Si Oxide Growth Rate Taking Account of Interfacial Si Emission*

Kageshima, H., Shiraishi, K., Uematsu, M.

Electrochemical Society
8 Conference Proceedings Theoretical Investigation Of Nitrogen-Doping Effect On Native Defect Aggregation Processes In Silicon

Kageshima, H., Taguchi, A., Wada, K.

Materials Research Society
3 Conference Proceedings First-Principles Study of Photoluminescence From Silicon/Silicon-Oxide Interfaces

Kageshima, H., Shiraishi, K.

MRS - Materials Research Society
9 Conference Proceedings Epitaxial Graphene Growth Studied by Low-Energy Electron Microscopy and First-Principles

H. Kageshima, H. Hibino, M. Nagase

Trans Tech Publications
4 Conference Proceedings First-Principles Study of Interfacial Reaction Atomic Process at Silicon Oxidation

Kageshima, H., Shiraishi, K.

MRS - Materials Research Society
10 Conference Proceedings Relation between Solubility of Silicon in High-k Oxides and the Effect of Fermi Level Pinning

N. Umezawa, K. Shiraishi, K. Kakushima, H. Iwai, K. Ohmori

Electrochemical Society
5 Conference Proceedings Microscopic Mechanism of Silicon Thermal Oxdation Process

H. Kageshima, M. Uematsu, T. Akiyama, T. Ito

Electrochemical Society
11 Conference Proceedings Invited Paper: Establishment of Guidelines for Better Ceramics through Novel Examination of Features in Ceramic Processing

Uematsu, K.

American Institute of Chemical Engineers
6 Conference Proceedings Oxidation simulation of silicon nanostructure on silicon-on-insulator substrates

Uematsu, M., Kageshiwa, H., Shiraisbi, K.

Electrochemical Society
12 Conference Proceedings Stability and Reactivity of [11-20] Step in Initial Stage of Epitaxial Graphene Growth on SiC(0001)

H. Kageshima, H. Hibino, H. Yamaguchi, M. Nagase

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12